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Wafer level packaging has been applied to VTI`s sensors
 
  VTI has successfully applied standard WLP redistribution and bumping technology to a capped MEMS wafer. The next step will be to assemble ICs on the MEMS wafer. Later, several ICs will be stacked on MEMS: the sensor front end, MCU and radio chip on separate dies. This is the way to future intelligent, wireless sensors.
Capping technology enables WLP : The enabler for applying WLP for MEMS is VTI's unique 3D-MEMS capping technology. Vertical silicon feed-throughs bring electrical contact from the top surface to the underlying MEMS. The top surface is fully planar so that further wafer level process steps can be applied after capping. VTI have created a glass-silicon capping wafer technology that provides a large number of feed-throughs with very low parasitic capacitance, a high isolation resistance and a reasonably low contact resistance. It has been in full scale production of single and three axis accelerometers and pressure sensors for several years and has been used in many prototype and R&D sensors and other devices, including silicon resonators. ...





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in week 47/2006:


Mass flow meters and controllers for gases now with Profibus
 
  Precision and Interconnectivity. The “red-y smart series” of thermal mass flow meters from Vögtlin Instruments AG are setting new standards in precision and reliability, delivering an impressive new concept in instrument innovation. Instrument versions for use with Fieldbus are now available. Precision CMOS-Semiconductor sensors. The mass flow meters and controllers in the “red-y smart series“ bring together innovative technology and the extensive experience of Vögtlin, a company that develops and manufactures measurement and control instruments.
Equipped with CMOS sensor technology, the principle of thermal mass measurement is applied to determine the flow rate with high precision. The analog/digital conversion on the semiconductor sensor guarantees reliable measurement and minimizes susceptibility to disruptions. Simple communication (analog and digital). The instruments feature analog signals as standard (4 – 20 mA, 0 – 5 V, ...) and an RS-485 digital interface. As well as the analog interface, the customer has the choice of a MODBUS interface, which enables simple integration with existing systems. Versions for the PROFIBUS Fieldbus connection are now also available. ...





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Advanced Portable Hygrometer Offers Measurement of Dew Point in Hydrogen
  Within the power industry it is common practice to use hydrogen as a direct coolant for the generator stator windings. Hydrogen is used because it has an extremely high heat transfer capacity and is much more efficient at transferring heat than any other medium. It is vital that this process can measured and Michell Instruments’ portable Cermax IS, with its hazardous area capabilities, is the ideal solution. The re-circulating hydrogen removes heat from the generator, transferring it via a heat exchanger into a secondary cooling circuit which uses de-mineralized water. Often this de-mineralized water is then cooled either by sea water or river water, dependent upon location of the power station. As it is not possible to hermetically seal the generator set castings, there is a potential for moisture to ingress from the surrounding air, similarly, as the heat exchanger gradually becomes more porous with age, it too will allow moisture to get into the hydrogen. It is therefore essential that the dew point of the hydrogen is monitored and maintained at a safe margin, as a build up of moisture in hydrogen can lead to a risk of flashover. Michell’s intrinsically safe portable dew point hygrometer can be used for this type of application as a spot check tool. ...





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SCP1000 digital low power pressure sensor
 
  SCP1000 is based on VTI`s proven 3D-MEMS capacitive sensor element technology, which is an optimized combination of technologies to achieve best performance at smallest size and lowest power. The relative capacitance change over the measuring range is typically 50% making it easy to measure and enabling high signal to noise ratio and accuracy even at low current levels. The glass insulation in use gives high isolation resistance (low leakage current) and low stray capacitance.
As a result the output signal 1/C (C=capacitance) has excellent linearity and can be measured at low current levels. The two silicon wafers are anodically bonded together resulting in a stable hermetically sealed structure, where no chemicals or particles can intrude into the space between the capacitive electrodes. The mechanical material in use is single crystal silicon giving hysteresis free operation (no plastic deformation) and excellent over-range and shock performance. The sensor can withstand a pressure more than 30 times the measuring range. The excellent long-term stability of pressure sensors made in this technology was already proven in older sensor designs in the 1980’s. ...





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Ultrasound in Organic Chemistry
 
  In the chemical industry there is a range of organic products, which crystallize and can no longer be used as soon as the process temperature falls below 150°C. In such cases, KROHNE offers throughflow meters with heated cladding. Ultrasound is the measuring principle of choice at a chemical company in Genf. The UFM 3030 from KROHNE is the standard device for the process industry.
Even the basic version can handle temperatures of up to 220°C, while temperatures of up to 500°C are no problem for the high temperature version. The UFM 3030 is used in the steamer with internal condenser to measure different substances. The nominal throughflow of 850l/h is regulated by a gate valve. To keep the various process media liquid, the UFM 3030 is surrounded with heated cladding, which has a mixture of water and glycol flowing through it. This has a temperature of 200°C at a pressure of 15-20 bar, so the media in the pipe always stays liquid. The company also required the pressure loss to be kept as low as possible. With the UFM 3030 it's no problem. The sensor is ...





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Single or multi-axis measurement in the same package
 
  VTI offers unique sensor solution for use in vehicles. VTI`s new digital accelerometer component platform offers the same performance in any measuring direction relative to its mounting plane or the vehicle. Products include 1-, 2- and 3-axis sensors (x, y, z, x-y, x-z, y-z, x-y-z). This gives flexibility for optimum measurement location, easy assembly into the vehicle and resulting increasing system performance and cost and time savings.
Enablers for this are VTI's 3D-MEMS advanced micromachining technology, modern intelligent interface ASIC technology and robust and reliable automotive component packaging. All products are specified for -40...+125°C operation and qualified according to AEC-Q100. Accurate, stable, durable and small in size. Products based on the digital platform have the same excellent features as VTI's previous products, robustness against mechanical shocks and stability and accuracy in automotive environments. VTI's 3D-MEMS technology provides a large accurate signal out of the sensing element together with controlled damping for optimum frequency response. Accuracy has been brought to a new level meeting toughest requirements of inclination measurement in automotive EPB (Electric Parking Brake) ...





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New and Improved 2-Wire Transmitter Completes Formidable Easidew Range
 
  Michell Instruments are delighted to announce they have up-graded their Easidew Transmitter. The Easidew 2-Wire Transmitter improves the already highly successful range of Easidew instruments that includes portable and on-line hygrometers, as well as dew point transmitters. The Easidew range was developed as a direct result of market demand for simple and affordable dew point measurement and has been an enormous success since the ranges launch in 2001.
The newest addition to the range, Easidew 2-Wire is a low cost, rugged impedance dew-point transmitter for continuous measurement in compressed air or process gas. The Easidew 2-Wire transmitter offers the customer many more new and improved features. The modified transmitter can now be connected in a 2-Wire loop configuration whilst maintaining complete backwards compatibility with all existing 3-Wire installations. This simplifies the introduction of the new design and the ongoing service requirements. Another new feature of the transmitter is ...





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